Transistor gate dimensions have been reduced 200X during the past 30 years (from 10mm in the 1970s to a present-day size of 0.06mm). The transistor and feature size scaling have enabled microprocessor performance to increase exponentially with transistor density and microprocessor clock frequency doubling every two years. In this paper we describe Intel's latest 130nm CMOS logic technology used to make high-performance microprocessors >3GHz.